A high-performance, low-cost, capacitive position-measuring system is described. By using a highly linear oscillator, shielding and a three-signal approach, most of the errors are eliminated. The accuracy amounts to 1 mu m over a 1 mm range. Since the output of the oscillator can directly be connected to a microcontroller, an A/D converter is not needed.>
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Toth et al. (1992) studied this question.
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