(YBa 2 Cu 3 O 7−δ ,Au)/SrTiO 3 /LaAlO 3 thin film conductor/ferroelectric coupled microstripline phase shifters for phased array applications

We report on the design, fabrication, and testing of novel YBa2Cu3O7−δ/SrTiO3/LaAlO3 (YBCO/STO/LAO) and Au/SrTiO3/LaAlO3 (Au/STO/LAO) coupled microstrip line phase shifters (CMPS). These CMPS were tested at frequencies within the Ku and K bands (12–20 GHz), at temperatures from 24 to 77 K, and at dc voltages (Vdc) from zero to 350 V. A relative insertion phase shift (Δφ) of 390° was measured for an eight-element YBCO/STO/LAO CMPS at Vdc=350 V, 16 GHz, and 40 K. At 77 K, a Δφ ∼260° was obtained for the CMPS at the same bias and frequency. Both results correspond to an effective coupling length of 0.33 cm. At both temperatures, the phase shifter exhibits a figure of merit of ∼30°/dB. To our knowledge, these are the best results published so far at these frequencies where miniaturization, insertion loss, and phase delay are key considerations.