We have developed a capacitance displacement sensor whose novel design greatly simplifies its construction and use. It is small, compact, extremely simple, and capable of angstrom resolution. It can be used with samples of any shape, size, or dielectric constant. One variant of the design allows its use at high temperatures, where such resolution has been unattainable until now. It may also be used to detect small changes in angle.
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Genossar et al. (1990) studied this question.
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