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November 1, 1983Journal of The Electrochemical Society

Silicon Damage Caused by Hydrogen Containing Plasmas

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Authors

RFR. G. FrieserUniversity of North Carolina at CharlotteFMF. J. MontilloIBM (United States)NZN. B. Zingerman

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Cite This Study

Frieser et al. (1983) studied this question.

synapsesocial.com/papers/6a8a85c8ec2e105e8ac1507ahttps://doi.org/10.1149/1.2119559
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