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October 1, 1986IEEE Transactions on Electron Devices

On the accuracy of channel length characterization of LDD MOSFET's

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Authors

JSJ.Y.-C. SunNational Yang Ming Chiao Tung UniversityMWM.R. WordemanIBM (United States)SLS.E. LauxIBM (United States)

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Sun et al. (1986) studied this question.

synapsesocial.com/papers/6a8a921751cd0cd12ac15abahttps://doi.org/10.1109/t-ed.1986.22707
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