A medium-range order of hydrogenated amorphous silicon germanium (a-Si1-x Ge x :H) alloys is investigated using small-angle X-ray scattering. It is found that the scattering intensities I(h) of a-Si:H and a-Ge:H decrease with scattering vector h as represented by I(h)∼h -3. However, in the case of a-Si1-x Ge x :H alloys, the scattering intensity decreases with h as represented by I(h)∼h -P (P<3). This shows that the alloys take on a mass fractal structure. At around x=0.5, the fractal dimension tends to approach the value of 2.
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Muramatsu et al. (1989) studied this question.
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