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June 1, 1987Journal of Applied Physics

Structural studies of low-temperature low-pressure chemical deposited polycrystalline silicon

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Authors

DMD. MeakinSiemens (Germany)JSJ. StoëmenosAristotle University of ThessalonikiPMP. MiglioratoUniversity of Campania "Luigi Vanvitelli"

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Meakin et al. (1987) studied this question.

synapsesocial.com/papers/6a8aa8868b2cdb42c433244fhttps://doi.org/10.1063/1.338325
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