dc magnetron production of amorphous silicon solar cells

The operation of a dc cylindrical magnetron with a stainless-steel cathode in silane gas was investigated. Coating rates up to 0.15 μm/min were obtained for hydrogenated amorphous silicon (a-Si:H). The photoconductivity of the films was slightly dependent on coating rate. The optical properties of the films were investigated and found to be an indicator of film quality. The infrared spectra and photoconductive properties of doped films were also studied. Solar cells of the p-n type in which the p layer is either a-Si:H or a-SixC1−x:H were made and their performance studied. It was concluded that the dc magnetron is capable of producing good cells with higher deposition rates than previously obtainable.