Amorphous Si-F-H films were prepared by dc glow discharge in an atmosphere of SiF4 + H2. Optical and electrical measurements have been performed to evaluate the film quality. The photoconductivity of amorphous Si-F-H solar cell showed the efficiency of 1.3% under simulated AM1, 100-mW/cm2 insulation.
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Konagai et al. (1980) studied this question.
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