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The mass distribution of ionic radicals in a magnetized CF4plasma is measured by a newly developed ion cyclotron resonance mass spectrometer (ICR-MS). The density ratio of CF+to CF3+increases with plasma density for DC discharge and decreases with CF4pressure for electron cyclotron resonance discharge. Negative ions F-and F2-are detected at a CF4gas pressure of 3–9×10-4Torr for DC discharge. Fragmentation of a CF4gas by electron beam injection is also measured by this spectrometer.
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Tetsu Mieno (1994) studied this question.
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