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July 1, 1984Applied Physics Letters

Spatial concentrations of silicon atoms by laser-induced fluorescence in a silane glow discharge

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Authors

RRRichard M. RothColorado Permanente Medical GroupKSKenneth G. SpearsUniversity of MichiganGWGeorge N. WongAlbert Einstein College of Medicine

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Roth et al. (1984) studied this question.

synapsesocial.com/papers/6a70969af44fa9f079de4169https://doi.org/10.1063/1.94992
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