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March 1, 1981Journal of Applied Physics

Origin of emitting species in the plasma deposition of a-Si:H alloys

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FKF. J. KampasBryn Mawr CollegeRGR. W. GriffithUniversity of Minnesota

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Kampas et al. (1981) studied this question.

synapsesocial.com/papers/6a70969bfebe604dd7095c08https://doi.org/10.1063/1.329752
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