This work presents a simple and versatile approach for the growth of in-situ contacted single-walled carbon nanotubes (SWCNTs) and subsequent improvement of the contacts using a self-aligned process. We investigated the conditions for the thermal CVD growth of SWCNTs and developed a variety of multilayered metal systems for SWCNT growth at temperatures between 650 °C and 900 °C. The catalytically active layers were either an Fe/Mo bilayer or a Co layer. Further, we report that some of the multilayer systems presented allow lithography free contact improvement by electroless metal deposition.
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Seidel et al. (2003) studied this question.