Switching time of planar ferroelectric capacitors using strontium titanate and barium strontium titanate films

A microstripe cavity was used to make microwave ( f ∼10 GHz) measurements of the time of variation of the permittivity of SrTiO 3 and (Ba,Sr)TiO 3 films exposed to unipolar video-frequency voltage pulses. It was shown that the permittivity of SrTiO 3 films varies over times less than 30 ns. For (Ba,Sr)TiO 3 films two characteristic times of variation of the permittivity were identified: a fast variation over times less than 30 ns and a slower variation, on the order of 20 μ s.