Chemically bonded diamondlike carbon films from ion-beam deposition

Carbon films on a Ni(111) surface are deposited from 1--300-eV mass-selected C⁺ beams in a UHV chamber and the energy and dose dependence of the C Auger line shape is monitored. Initial deposition forms a carbide structure which is chemically bonded to the surface. The Auger line shape evolves with increasing C⁺ dose into that of a diamondlike structure for ion energies in the range 10--300 eV. Features of the x-ray and the ultraviolet photoemission spectra support this interpretation. The diamondlike films do not chemisorb O₂, have a low sputtering yield with O⁺ ions, and exhibit a higher thermal stability than the carbidic films; these results are discussed in terms of a qualitative model.