In Situ Monitoring of Tantalum during Electrochemical-Mechanically Induced Oxidation

We demonstrate an in situ method to observe the steps of oxidation of tantalum under electrochemical-mechanical stimulation.This was possible through an electrochemical cell incorporated into an atomic force microscope.Using this method, the surface could be concurrently monitored for oxidation by applying an electrochemical potential under mechanical contact.The technique reported here can be used for any other material systems for surface and interfacial studies.