The feasibility of a surface plasmon resonance method for optical characterization of ion-implanted glass surface layers is demonstrated. Resonance curves were measured for silica and fluoride glass implanted with various nonmetal and metal ions and compared with those of unimplanted samples. Regardless of their thinness and unclear depth profile of refractive index, the effect of ion implantation on the refractive index and absorption of the glass surface layers could be quantitatively evaluated by curve fitting method.
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Dai et al. (1993) studied this question.
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