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An experiment is carried out to investigate the influence of electrode surface oxidation on the vacuum breakdown characteristics, and the cleaning effect of heating treatments. An X-ray photoelectron spectroscopy is used to analyze the change of gas absorption on the electrode surface with the heating treatments. This analysis aims at identifying cleaning effect on a copper electrode surface.With an increase adsorbed gas, the breakdown voltage decreases. With an increase on the temperature of heating treatments, the adsorbed gas is likely to be removed and the breakdown voltage increases. The oxidation degree of copper surface (Cu2O, CuO) is strongly dependent on the exposure time to the air. With an increase in the temperature of the heating treatment, the copper becomes more deoxidized. This indicates that the heating treatment in vacuum provides substantial cleaning effects on the electrode surface.
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Shioiri et al. (1991) studied this question.
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