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June 1, 1994Journal of The Electrochemical Society

Global Model of Plasma Chemistry in a High Density Oxygen Discharge

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Authors

CLChae-Jin LeeUniversity of California, BerkeleyDGDavid B. GravesPrinceton UniversityMLM. A. LiebermanUniversity of California, Berkeley

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Lee et al. (1994) studied this question.

synapsesocial.com/papers/6a8bc2c9fdccabdd22b1e41chttps://doi.org/10.1149/1.2054960
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