Secondary ion mass spectrometry depth profiling of proton-exchanged LiNbO3 waveguides

Simultaneous depth profiles for H and Li have been measured in proton-exchanged lithium niobate crystals (LiNbO3) by the use of charge-compensated secondary ion mass spectrometry (SIMS). Electron flooding of the insulator during sputtering permits accurate depth profiling through the exchanged region and into the substrate. Four samples of z-cut proton-exchanged LiNbO3 were analyzed using SIMS, and were used in optical waveguiding experiments. In each sample, the H distribution is in the shape of a plateau that extends from the surface to a depth that is in good agreement with the results of the optical waveguiding measurements.The Li profiles show reduced concentrations within the regions of high H concentration, that is, within the waveguiding regions. Based on SIMS data, the proton-exchange process appears to stabilize at a value of 0.4