The method of maximum likelihood has been used to calculate the estimators, and their standard errors, of the parameters of joined half-gaussian fits to back-scattering data. The range and straggle of 60-400 keV As implants into Si at various doses have been measured with a precision of two or three nm and a comparable accuracy, with normal incidence RBS.
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Jeynes et al. (1985) studied this question.
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