A detailed study has been made of the performance characteristics of a new imaging time-of-flight secondary ion mass spectrometer based on the Poschenrieder design and utilizing a 30-kV gallium primary beam column. In spectral mode the maximum transmission and mass resolution have been measured and the relationship between transmission and mass resolution have been determined. The influence of primary pulse length, extraction voltage, and secondary ion mass on these parameters are described. A variety of materials have been used in the study, ranging from pure molybdenum, cesium iodide to insulating polymers such as poly (methylmethacrylate) and polystyrene. The influence of sample charging is discussed. The spatial resolution of the liquid metal ion beam in continuous and pulsed mode has been assessed and the performance of the imaging time-of-flight secondary ion mass spectrometry system is described using a model metal on silicon device. The use of the system in micrometer scale depth profiling is also described.
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Eccles et al. (1989) studied this question.