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April 1, 2002IEEE Transactions on Electron Devices

Status and prospects for SiC power MOSFETs

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Authors

JCJames A. CooperPurdue University West LafayetteMMM. R. MellochPurdue University West LafayetteRSRanbir SinghBML Munjal University

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Implication

Literature review demonstrates progress in silicon carbide power MOSFET design, highlighting critical fabrication bottlenecks and paths toward commercialization.

Key Points

  • Review the development of silicon carbide (SiC) power MOSFETs since 1992 and evaluate key fabrication challenges alongside commercialization prospects.
  • Surveyed technological developments and literature on SiC power MOSFETs from 1992 through the contemporary decade.
  • Assessed device architectures, processing hurdles, and industrial manufacturing criteria necessary for commercial adoption.
  • SiC technology achieved substantial progress over a ten-year span, shifting from early experimental prototypes toward high-voltage power switches.
  • Critical device fabrication issues were identified as primary barriers that must be resolved to enable full-scale commercialization.

Cite This Study

Cooper et al. (2002) studied this question.

synapsesocial.com/papers/6a8bcbadf71fc1553cbea9dbhttps://doi.org/10.1109/16.992876
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