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October 1, 1984Japanese Journal of Applied Physics

Preparation of Low-Reflectivity Amorphous Silicon Using DC Magnetron Sputtering

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Authors

TMTakahiro MakinoGumma Paz CollegeKKKazuyoshi KamoshidaEYEiichi YamamotoEhime Prefectural Central Hospital

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Makino et al. (1984) studied this question.

synapsesocial.com/papers/6a8bde4a5ef9ff12d789524fhttps://doi.org/10.1143/jjap.23.1304
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