Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
March 1, 1978Journal of The Electrochemical Society

Experimental Investigation of the Gas Phase in a Chemical Vapor Deposition Reaction: Application to the Silane‐Ammonia Reaction Leading to Silicon Nitride Deposits

View Full Paper
Ask AI
Bookmark
Share

Authors

GCGérard CochetCentre National de la Recherche ScientifiqueHMH. MellottéeCentre National de la Recherche ScientifiqueRDR. DelbourgoConditions Extrêmes et Matériaux Haute Température et Irradiation

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

Cochet et al. (1978) studied this question.

synapsesocial.com/papers/6a8beae7d1cabd4f76c5d211https://doi.org/10.1149/1.2131479
View Full Paper
Ask AI
Bookmark
Share