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December 1, 1977Journal of The Electrochemical Society

Mass Spectrometric Detection of Intermediates in Chemical Vapor Deposition of Si3 N 4

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SLSin‐Shong LinNorthwestern University

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Sin‐Shong Lin (1977) studied this question.

synapsesocial.com/papers/6a8beae7d1cabd4f76c5d212https://doi.org/10.1149/1.2133202
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