Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance

A miniaturized highly sensitive single-chip multichannel quartz-crystal microbalance prepared by deep reactive ion etching is presented. In the present work, quartz resonators in a single-chip with the diameters in the range 0.05–1.0 mm and thicknesses in the range 18–82 μm were fabricated. The conductance measurements carried out on the resonators showed that the Q factor is inversely proportional to resonator thickness. The Q-factor value as high as ∼30 000 has been observed in case of a 94 MHz resonator whose diameter is 1 mm and the thickness 17.8 μm. The Q factor of a resonator of very small diameter (0.1 mm) reached the value 5700.