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Carbon nanotube (CNT) -extracted lithography (CEL) was developed to create high-quality nanoscale gaps defined by the size of CNTs. An individual multiwalled CNT (MWCNT) was deposited across electrodes by the composite electric field guided assembly method (CEGA) developed previously. After blanket deposition of a metal layer, the MWCNT was removed to obtain a nanoscale gap. The CEL can provide a technique for the mass fabrication of well-defined and precisely positioned nanosized gaps in a reproducible manner.
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Chung et al. (2003) studied this question.
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