The electrophysical properties and phase composition of thin lead titanate films prepared on various substrates by layer-by-layer magnetron sputtering of metals followed by annealing have been studied. The main parameters of the metal-ferroelectric film-metal multilayer structures, namely, the spontaneous polarization, coercive field, and permittivity, were studied for various substrate types and electrode materials. The conditions favorable for the formation of PbTiO 3 films that are similar in stoichiometry and phase composition were established.
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Sidorkin et al. (2004) studied this question.
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