Answers are grounded in this paper and cite their sources.
A brief review of the techniques used to oxidise silicon in oxygen discharges is given and a series of experiments that have been carried out to identify the oxidizing species are described. There is strong evidence to suggest that the negative ion O - is responsible for the observed phenomenon.
No takes yet. Share an insight, caveat, or question.
Moruzzi et al. (1982) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: