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January 1, 1982Applied Physics Letters

Self-annealed ion implanted n+-p diodes

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Authors

GCG. CembaliBologna Research AreaMFM. FinettiCalifornia Institute of TechnologyPMP. G. MerliUniversity of Minnesota

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Cembali et al. (1982) studied this question.

synapsesocial.com/papers/6a8d0d9eb7e5f37e3ddacbbehttps://doi.org/10.1063/1.92925
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  1. 1Self-annealing of ion-implanted silicon: First experimental results1981 · 47 citations