The optical properties (n,k,ε,neff) of chemically ordered a-Si1−xCx:H alloys have been measured and then analyzed with the effective-medium theory. Included is the first experimental result for an amorphous binary semiconductor that is known to be almost fully chemically ordered, and represented by the formula a-SiC0.64:H. Chemical order is induced by heavy dilution of the plasma with hydrogen. Chemical ordering shifts absorption to shorter wavelengths. Analysis using a scaling theory to define optical constants of different tetrahedron components leads to serious errors in the a-Si1−xCx:H series.
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Smith et al. (1989) studied this question.
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