Coupons of polished aluminium, glass and polystyrene were exposed to radiofrequency (r.f.) plasmas containing helium, nitrogen and oxygen. Angle-resolved XPS measurements of the treated surfaces were made immediately, after a few days and after about 9 months. The data were interpreted in terms of a simplified substrate–overlayer model with allowance for fractional coverage. The results are consistent with surface cleaning followed by hydrocarbon re-contamination for aluminium and glass, and with the diffusion of adatoms towards the bulk in the case of polystyrene.
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R.W. Paynter (1999) studied this question.
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