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January 1, 1961Journal of The Electrochemical SocietyOpen Access

Epitaxial Silicon Films by the Hydrogen Reduction of SiClsub 4

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HTH. C. Theuerer

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H. C. Theuerer (1961) studied this question.

synapsesocial.com/papers/6a8e60d4e89c4e0bb511d6e1https://doi.org/10.1149/1.2428182
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