High resolution x-ray microscope

The authors present x-ray images of grid meshes and biological material obtained using a microspot x-ray tube with a multilayer optic and a 92-element parabolic compound refractive lens (CRL) made of a plastic containing only hydrogen and carbon. Images obtained using this apparatus are compared with those using an area source with a spherical lens and a spherical lens with multilayer condenser. The authors found the best image quality using the multilayer condenser with a parabolic lens, compared to images with a spherical lens and without the multilayer optics. The resolution was measured using a 155-element parabolic CRL and a multilayer condenser with the microspot tube. The experiment demonstrates about 1.1μm resolution.