Improvement of Electron Beam Mastering Using Dry Etching Process

We have developed an electron beam recorder and utilized it in high-density disk mastering. We discussed an electron scattering in disk mastering that degrades the reproduction performance of disks. In order to improve the reproduction performance, we applied a dry etching process to the disk mastering process, and confirmed its efficacy in reducing the scattering effect and improving disk noise by calculation and experiments. We fabricated `Blu-ray Disc'-type read-only memory disks with and without the dry etching process, and noticed the advantage of the dry etching process from the jitter comparison. Finally, a 4.7% jitter was achieved in a 25 GB capacity disk, while a 5.7% jitter was obtained in a 27 GB capacity disk with additional recording compensation.