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March 1, 1994Applied Optics

Image scanning ellipsometry for measuring nonuniform film thickness profiles

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Authors

ALAn‐Hong LiuPWPeter WaynerNorthwestern UniversityJPJoel L. PlawskyRensselaer Polytechnic Institute

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Liu et al. (1994) studied this question.

synapsesocial.com/papers/6a8f298f2caf27bf50fed19ahttps://doi.org/10.1364/ao.33.001223
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