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June 1, 1997IEEE Microwave and Guided Wave Letters

A micromachined high-Q X-band resonator

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Authors

JPJohn PapapolymerouMichigan State UniversityJCJui‐Ching ChengNational Taipei University of TechnologyJEJ.R. EastUniversity of Michigan

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Papapolymerou et al. (1997) studied this question.

synapsesocial.com/papers/6a8f5231eb768c73dc8eadachttps://doi.org/10.1109/75.585207
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