Answers are grounded in this paper and cite their sources.
BaTiO3 and SrTiO3 thin films were prepared by reduced-pressure metalorganic chemical vapor deposition. Ba(thd)2-di-tri, or Sr(thd)2, and Ti(OPr1)2-(thd)2 were dissolved in diglyme and were delivered by an aerosol-assisted non-contact vaporizer. Growth kinetics of the thin films was studied as a function of growth temperature, liquid source concentration and molar ratio of the metalorganic precursors. The mechanisms of composition control, crystallization and phase formation of the thin films were investigated over a wide range of stoichiometry.
No takes yet. Share an insight, caveat, or question.
Ma et al. (2000) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: