Analysis of SiH vibrational absorption in amorphous SiOx:H (0≤x≤2.0) alloys in terms of a charge-transfer model

Amorphous SiOx:H films were deposited at 300 °C by rf glow discharge of SiH4-O2 mixtures, and the SiH stretching vibrational absorption was investigated as a function of the oxygen content x. The absorption profiles were examined on the basis of the random-bonding model (RBM). The length dSiH of SiH bonds in four H-Si (Si3−nOn) bonding units was examined in terms of a charge-transfer model, using the Sanderson’s electronegativity. Using these dSiH values, the peak wave numbers for the four components were found to be 2000, 2108, 2195, and 2260 cm−1, in agreement with the experimental ones determined on the basis of the RBM.