Cross-sectional CoCr thin film specimens prepared by three different methods; fracture, ultra-microtome and ion-beam thinning, are observed by electron microscopes to investigate the differences in the microstructure revealed in the respective micrographs. It is shown that the specimen prepared by the ion-beam thinning method provides most detailed and clear crystallographic features of the film structure.
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Futamoto et al. (1986) studied this question.
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