Vertically conducting thin film high power deep ultraviolet (DUV) light emitting diodes with peak emission wavelength of 280 nm are reported. The light emitting diodes (LEDs) were fabricated using a laser assisted lift-off process. Single chip devices exhibited a record high output power of 5.5 mW at a continuous-wave (cw) current density of only 25 A/cm 2 . Their lifetime is estimated to be well over 2000 h. We attribute the superior performance of the devices to reduced thermal impedance and the vertical current conduction device geometry.
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Adivarahan et al. (2009) studied this question.
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