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While still considered mainly a scientific technique, the scanning tunneling microscope (STM) is a promising new tool for the detailed characterization of surfaces of industrial or technological interest, owing to its unique combination of very high lateral and vertical resolution. We report first on STM measurements of diamond turning mark topography details on aluminum substrates used in magnetic storage device manufacturing. The instrument used was designed specifically for industrial applications: operation in ambient air in a typical manufacturing laboratory, large scan range (20 μm lateral, 4 μm vertical) at low operating voltages (below 150 V), computerized and automated control. The problems associated with these requirements are discussed. The STM measurements reveal considerable detail of the diamond turning marks, that can be useful in quality control of the substrate or the turning process.
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Gehrtz et al. (1988) studied this question.
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