The RF coplanar probe is a popular tool for launching high-frequency signals onto and off of a wafer. Physically contacting the die, it establishes a crucial link between the test system and wafer. Their proper use permits a higher degree of measurement accuracy compared to test fixturing. To augment the reader's understanding, this tutorial reviews selected issues related to the design, construction, characterization, selection, calibration, and repeatability of RF on-wafer coplanar probes.
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S.A. Wartenberg (2003) studied this question.
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