Reactivity of Acid Generators for Chemically Amplified Resists with Low-Energy Electrons, Nakano, Atsuro, Kozawa, Takahiro, Tagawa, Seiichi, Szreder, Tomasz, Wishart, James F., Kai, Toshiyuki, Shimokawa, Tsutomu
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Nakano et al. (2006) studied this question.
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