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November 1, 1981Journal of The Electrochemical SocietyOpen Access

Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide

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Authors

LEL. M. EphrathBoston CollegeDDD. J. DiMariaIBM (United States)FPF. L. PesaventoIBM Research - Thomas J. Watson Research Center

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Ephrath et al. (1981) studied this question.

synapsesocial.com/papers/6a9051b9f5c79ce9992dac07https://doi.org/10.1149/1.2127261
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