Experimental evaluation reveals plasma potential waveforms in capacitively coupled discharges, indicating significant higher harmonic generation at low operating pressures.
A method is presented that enables measurement of plasma potential waveforms. The method consists of measurement by an uncompensated probe and analysis of the measured waveforms by means of a model of the sheath around the probe. The method was successfully tested in a nitrogen capacitively coupled discharge. The strong influence of the sheath around the probe on the probe voltage and the correlation between the probe current waveform and the discharge current are shown. At low pressures, the plasma potential waveform contains a large amount of higher harmonic frequencies whose amplitudes are comparable to the amplitude of the fundamental frequency.
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Pavel Dvořák (2010) studied this question.
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