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The capacitance manometer appears to be a convenient and reliable pressure measuring device over the range 0.1–1000 mTorr. We find that deviations from linearity in this region do not exceed a few tenths of a percent. On the other hand, mercury streaming in a trapped McLeod gauge can introduce errors in the measured pressures which are dependent upon the pressure in a complicated manner.
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J. Philip Bromberg (1969) studied this question.
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