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An efficient method to fabricate micropatterned mesoporous silicate films has been demonstrated. These films were prepared, in an additive manner, by supercritical CO2-assisted condensation of tetraethyl orthosilicate within lithographically exposed block copolymer templates containing photoacid generators. Chemically amplifiable copolymer templates resulted in high-fidelity replication of microscopic and nanoscopic features.
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Nagarajan et al. (2007) studied this question.
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