A new technique for high resolution lithography of phthalocyanine molecules is described. The phthalocyanine substituted with long chain alkyl amide groups was found to show good solubility in chloroform and the phthalocyanine films show good sensitivity to electron beams (Dn 0.5=6.8 µC/cm2), with a contrast value of γ=1.6, and with semiconductivities (<10-6 S/cm).
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Tabei et al. (1985) studied this question.
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